Abstract: Based on the SLEUTH model, this paper uses scenario analysis to simulate the spatial expansion of industry-led villages and towns in semi-urbanization areas by collecting remote sensing data and network open data. Taking Chenghai District of Shantou City, Guangdong Province as an example, based on Landsat remote sensing image data from four time periods, including 1988, 1999, 2010 and 2016, as well as enterprise-related data, the study simulates and predicts the spatial expansion of villages and towns with the industrial space layer. At the same time, the spatial growth accuracy changes under different enterprise scale scenarios are compared. The results show that the accuracy of spatial expansion simulation based on industrial factors is better than that based on traditional spatial data. Because both the lee-Sallee index in fine calibration and final calibration of the former model are higher than those of the latter, and the compare index of the former is also higher. It can be seen that the simulation results of village expansion with industrial factors can more accurately reflect the actual development of villages and towns in semi-urbanization areas. When considering different enterprise sizes, the lee-Sallee index of towns and villages with small enterprises was the lowest, while the lee-Sallee index of towns and villages with large enterprises was the highest. Large enterprises have the strongest influence on the spatial expansion of villages and towns, while the influence of medium and small enterprises gradually decreases. By introducing SLEUTH model into the simulation study of spatial expansion of villages and towns in semi-urbanization area, it can enrich the simulation study of spatial expansion of villages and towns dominated by industry.